nanocalc膜厚测量

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                                                  NanoCalc 反射膜厚测量系统

                                                  膜厚测量 薄膜的光学特性主要有反射和干涉。NanoCalc薄膜反射测量系统可以用来进行10nm -250um的膜厚分析测量,对单层膜的分辨率为0.1nm。根据测量软件的不同,在1秒钟内可以分析单层或多达到10层的膜厚。

                                                   

                                                  产品特点

                                                  • 可分析单层或多层薄膜;
                                                  • 分辨率达0.1nm;
                                                  • 适合于在线监测;

                                                  使用原理

                                                  常用的两种测量薄膜的特性的方法为光学反射和投射测量、椭圆光度法测量。NanoCalc利用反射原理,通过测量宽光谱范围内的反射率曲线来进行膜厚测量。

                                                  查找n和k值

                                                  可以进行多达十层的薄膜测量,薄膜和基体材质可以是金属、电介质、无定形材料或硅晶等。NanoCalc软件包含了大多数材料的n和k值数据库,用户也可以自己添加和编辑。

                                                   

                                                    膜厚测量

                                                  应用

                                                  NanoCalc薄膜反射材料系统适合于在线膜厚测量,包括氧化层、中氮化硅薄膜、感光胶片及其它类型的薄膜。NanoCalc也可测量在钢、铝、铜、陶瓷、塑料等物质上的抗反射涂层、抗磨涂层等。

                                                  NanoCalc Systems Available

                                                  NANOCALC-2000-UV-VIS-NIR

                                                  Wavelength:

                                                  250-1100 nm

                                                  Thickness:

                                                  10 nm-70 um

                                                  Light source:

                                                  Deuterium and Tungsten Halogen

                                                  NANOCALC-2000-UV-VIS

                                                  Wavelength:

                                                  250-850 nm

                                                  Thickness:

                                                  10 nm-20 um

                                                  Light source:

                                                  Deuterium and Tungsten Halogen

                                                  NANOCALC-2000-VIS-NIR

                                                  Wavelength:

                                                  400-1100 nm

                                                  Thickness:

                                                  20 nm-10 um (optional 1 um-250 um)

                                                  Light source:

                                                  Tungsten Halogen

                                                  NANOCALC-2000-VIS

                                                  Wavelength:

                                                  400-850 nm

                                                  Thickness:

                                                  50 nm-20 um

                                                  Light source:

                                                  Tungsten Halogen

                                                  NANOCALC-2000-NIR

                                                  Wavelength:

                                                  650-1100 nm

                                                  Thickness:

                                                  70 nm-70 um

                                                  Light source:

                                                  Tungsten Halogen

                                                  NANOCALC-2000-NIR-HR

                                                  Wavelength:

                                                  650-1100 nm

                                                  Thickness:

                                                  70 nm-70 um

                                                  Light source:

                                                  Tungsten Halogen

                                                  NANOCALC-2000-512-NIR

                                                  Wavelength:

                                                  900-1700 nm

                                                  Thickness:

                                                  50 nm-200 um

                                                  Light source:

                                                  High-power Tungsten Halogen

                                                  For Reflectometry applications, the following items are required:

                                                  NC-2UV-VIS100-2

                                                  Bifurcated UV fiber
                                                  400 um x 2m
                                                  2x SMA connectors
                                                  Flexible metal jacketing

                                                  NC-STATE

                                                  Single point reflection measurement for non transparent samples

                                                  Step-Wafer 5 Steps 0-500 mm, calibrated 4"

                                                  If using a microscope, the following items are also needed:

                                                  NC-7UV-VIS200-2

                                                  Reflection probe for application microscopy with MFA-C-Mount

                                                  Step-Wafer 5 Steps 0-500 mm, calibrated 4"

                                                  NanoCalc Specifications

                                                  Angle of incidence:

                                                  90°

                                                  Number of layers:

                                                  3 or fewer

                                                  Reference measurement needed:

                                                  Yes (bare substrate)

                                                  Transparent materials:

                                                  Yes

                                                  Transmission mode:

                                                  Yes

                                                  Rough materials:

                                                  Yes

                                                  Measurement speed:

                                                  100 milliseconds to 1 second

                                                  On-line possibilities:

                                                  Yes

                                                  Mechanical tolerance (height):

                                                  With new reference or collimation (74-UV)

                                                  Mechanical tolerance (angle):

                                                  Yes, with new reference

                                                  Microspot option:

                                                  Yes, with microscope

                                                  Vision option:

                                                  Yes, with microscope

                                                  Mapping option:

                                                  6" and 12" XYZ mapping tables

                                                  Vacuum possibilities:

                                                  Yes

                                                   

                                                   


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